Article · Journal · 2022

Self-Formed Diffusion Layer in Cu(Re) Alloy Film for Barrierless Copper Metallization

Coatings

Citations: 7from other works
Field-weighted impact: 0.271.00 is the world average for its field and year
Among its field: 35th percentileby citations, against works of its field and year
Authors: 12from 3 institutions

Authors

12 authors across 3 institutions in 2 countries