مقالة · مجلة · 2016

Growth and characterization of silicon oxide films formed in the presence of Si, SiC, and Si3N4

Yaqiong Li, Lucas Nana Wiredu Damoah, Lifeng Zhang

Materials Science in Semiconductor Processing

• وصول مغلق
• دولي · دولتان

انتقل إلى الناشر10.1016/j.mssp.2016.06.014